Modern MicroFab and Micro Electro Mechanical Systems (MEMS)

Modern MicroFab and Micro Electro Mechanical Systems (MEMS)
Published 10/2025
Duration: 1h 36m | .MP4 1280×720 30 fps(r) | AAC, 44100 Hz, 2ch | 746.34 MB

The marvel of small world – circuits, sensors, and micro mechanics

What you’ll learn
– Understand foundations of micro fabrication technology
– Understand how sensors for modern robotics and neural interfaces are made
– Understand the cost and practices of modern fab foundry
– Challenges faced by design, materials and fabrication to enable successful products

Requirements
– Freshman engineering fundamentals

Description
This course is a survey of MEMS and microfab technology. The author has both theoretical background in academia and industrial foundry production experience.

MEMS stands for Micro Electromechanical Systems, or micromachining. Think about machine shops making metal components – now think about making them 100 times smaller using silicon, and mass producible volume production. The dramatic lowering of costs of sensors and electronics create hardware revolution.

In this class you will understand how people made MEMS devices – the fundamental sensors found in all modern electronics and phones. We will discuss

– semiconductor materials and their electronics properties

– mechanical properties of semiconductor materials and thin films

– fundamental processing technology of wafers

– basics of mechanics and materials

– silicon micromachining processes

– MEMS foundry for volume production

– cleanroom processing and cost

Prof. Chang Liu is a fellow of IEEE in the field of MEMS. He has extensive experience in academic and industry. He has also built products and entrepreneurial merchandise in both USA and China. Dr. Liu has a PhD degree from Electrical Engineering of the California Institute of Technology in Pasadena, CA. He is an expert of MEMS bioinspired sensors.

Who this course is for:
– Beginner students in semiconductor and MEMS sensors field.
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